100 mm Diameter |
|
|
|
| Part No |
Complete Spec (pdf) |
Quantity available |
Handle thickness (um) |
Handle Res (ohm-cm) |
Buried oxide (A) |
Device Thickness (um) |
Device Res (ohm-cm) |
Polish |
Notes |
| S57-901 |
Download |
4 |
300 +/- 5 |
> 4000 Ohmcm |
10000 +/- 500 |
10 +/- 0.5 |
> 4000 Ohm-cm |
SSP |
|
| S73-201 |
Download |
1 |
300 +/- 5 |
1 - 20 Ohm-cm |
20000 +/- 1000 |
50 +/- 1 |
0.01 - 0.02 Ohm-cm |
SSP |
|
| S10-102 |
Download |
2 |
300 +/- 5 |
1 -10 Ohm-cm |
10000 +/- 500 |
10 +/- 0.5 |
1 -10 Ohm-cm |
SSP |
|
| S70-403 |
Download |
2 |
303 +/- 5 |
1-10 Ohm-cm |
2000 +/- 100 |
5 +/- 0.5 |
1 -10 Ohm-cm |
SSP |
|
| S40-501 |
Download |
1 |
303 +/- 5 |
1 - 20 Ohmcm |
2000 +/- 100 |
20 +/- 0.5 |
1 - 20 Ohm-cm |
SSP |
|
| S70-201 |
Download |
6 |
328 +/- 5 |
1-20 Ohm-cm |
10000 +/- 500 |
10 +/- 1 |
1 -20 Ohm-cm |
SSP |
|
| S80-501 |
Download |
2 |
350 +/- 5 |
< 0.005 |
0 +/- 0 |
70 +/- 2 |
> 3000 Ohmcm |
SSP |
|
| S81-101 |
Download |
3 |
350 +/- 5 |
1 - 20 Ohmcm |
20000 +/- 1000 |
20 +/- 1 |
1 - 20 Ohm-cm |
SSP |
|
| S81-202 |
Download |
4 |
350 +/- 5 |
> 3000 Ohmcm |
10000 +/- 500 |
100 +/- 2 |
< 0.02Ohm-cm |
SSP |
|
| S77-01 |
Download |
3 |
350 +/- 5 |
1 - 10 |
20000 +/- 1000 |
80 +/- 0.5 |
1 每 10 |
DSP |
|
| S78-802 |
Download |
4 |
353 +/- 5 |
10 - 20 Ohm-cm |
20000 +/- 1000 |
150 +/- 1 |
10 - 20 Ohm-cm |
SSP |
|
| S39-001 |
Download |
3 |
367 +/- 5 |
0.005-0.01 |
2000 +/- 100 |
12.5 +/- 1 |
>4000 |
SSP |
|
| S14-02 |
Download |
16 |
380 +/- 5 |
< 0.005 Ohm cm |
0 +/- 0 |
145 +/- 5 |
2500 - 5500 Ohm-cm |
SSP |
|
| S92-201 |
Download |
2 |
380 +/- 5 |
0.01 - 0.05 Ohmcm |
15000 +/- 750 |
4 +/- 0.5 |
1 -10 Ohm-cm |
SSP |
|
| S29-101 |
Download |
6 |
380 +/- 5 |
0 -0.005 |
0 +/- 0 |
144.7 +/- 5 |
4000 -10,000 |
SSP |
|
| S42-102 |
Download |
4 |
380 +/- 5 |
0-0.005 |
0 +/- 0 |
122.5 +/- 2.5 |
4000-10,000 |
SSP |
|
| S59-901 |
Download |
2 |
400 +/- 5 |
1 - 10 Ohmcm |
10000 +/- 500 |
10 +/- 0.5 |
1 - 10 Ohm-cm |
SSP |
|
| S61-201 |
Download |
2 |
400 +/- 5 |
< 0.003 Ohm cm |
0 +/- 0 |
125 +/- 1 |
> 4000 Ohm-cm |
SSP |
|
| S61-202 |
Download |
4 |
400 +/- 5 |
< 0.003 Ohm cm |
0 +/- 0 |
100 +/- 1 |
> 4000 Ohm-cm |
SSP |
|
| S61-203 |
Download |
4 |
400 +/- 5 |
< 0.003 Ohm cm |
0 +/- 0 |
150 +/- 1 |
> 4000 Ohm-cm |
SSP |
|
| S61-204 |
Download |
8 |
400 +/- 5 |
< 0.003 Ohm cm |
0 +/- 0 |
175 +/- 1 |
> 4000 Ohm-cm |
SSP |
|
| S61-901 |
Download |
4 |
400 +/- 5 |
10 - 25 Ohmcm |
5000 +/- 200 |
9 +/- 0.35 |
1 - 3 Ohm-cm |
SSP |
|
| S72-501 |
Download |
8 |
400 +/- 5 |
1 -30 Ohm-cm |
10000 +/- 500 |
5 +/- 0.5 |
1 -30 Ohm-cm |
SSP |
|
| S76-601 |
Download |
15 |
400 +/- 5 |
1 - 10 Ohm-cm |
5000 +/- 250 |
20 +/- 0.5 |
1 - 10 Ohm-cm |
SSP |
|
| S29-002 |
Download |
10 |
400 +/- 5 |
0-0.005 ohm-cm |
0 +/- 0 |
124.7 +/- 5 |
2500 - 5500 ohm-cm |
SSP |
|
| S50-801 |
Download |
4 |
413 +/- 5 |
0.001 -0.004 Ohm cm |
0 +/- 0 |
95 +/- 2 |
5000 - 14000 Ohm-cm |
SSP |
|
| S14-01 |
Download |
7 |
425 +/- 5 |
0-0.005 |
0 +/- 0 |
145 +/- 2.5 |
4000-10,000 |
SSP |
|
| S55-301 |
Download |
1 |
425 +/- 5 |
0.01 - 0.1 Ohmcm |
40000 +/- 2000 |
100 +/- 1 |
0.01 - 0.1 Ohm-cm |
SSP |
|
| S81-901 |
Download |
10 |
425 +/- 5 |
> 4000 Ohmcm |
40000 +/- 2000 |
105 +/- 1 |
> 4000 Ohm-cm |
SSP |
|
| S82-601 |
Download |
3 |
425 +/- 5 |
> 10000 Ohmcm |
10000 +/- 500 |
15 +/- 0.5 |
> 10000 Ohm-cm |
SSP |
|
| S13-601 |
Download |
10 |
425 +/- 5 |
0 - 0.005 |
0 +/- 0 |
100 +/- 5 |
4000 -10,000 |
SSP |
|
| S48-801 |
Download |
1 |
425 +/- 5 |
0-0.005 |
0 +/- 0 |
85 +/- 2 |
>5000 |
SSP |
|
| S66-01 |
Download |
15 |
428 +/- 5 |
>4000 |
5000 +/- 250 |
100 +/- 1 |
>4000 |
DSP |
|
| S66-02 |
Download |
6 |
428 +/- 5 |
>4000 O-cm |
5000 +/- 250 |
100 +/- 1 |
>4000 O-cm |
DSP |
|
| S74-002 |
Download |
4 |
440 +/- 5 |
< 0.005 |
0 +/- 0 |
85 +/- 2 |
400-800 Ohmcm |
SSP |
|
| S13-502 |
Download |
7 |
440 +/- 5 |
< 0.005 |
0 +/- 0 |
85 +/- 2 |
2800 - 5200 Ohmcm |
SSP |
|
| S13-503 |
Download |
10 |
440 +/- 5 |
< 0.005 |
0 +/- 0 |
85 +/- 2 |
2800 - 5200 Ohmcm |
SSP |
|
| S13-507 |
Download |
2 |
440 +/- 5 |
< 0.005 |
0 +/- 0 |
85 +/- 2 |
2800 - 5200 Ohmcm |
SSP |
|
| S77-401 |
Download |
6 |
450 +/- 5 |
1 - 10 Ohm-cm |
10000 +/- 500 |
1.5 +/- 0.35 |
> 8000 Ohm-cm |
SSP |
|
| S65-902 |
Download |
2 |
453 +/- 5 |
1 - 20 Ohmcm |
2500 +/- 100 |
3 +/- 0.5 |
1 - 20 Ohm-cm |
SSP |
|
| S59-201 |
Download |
9 |
455 +/- 5 |
< 0.005 Ohm cm |
0 +/- 0 |
70 +/- 3 |
2500 - 5500 Ohm-cm |
SSP |
|
| S51-101 |
Download |
10 |
465 +/- 5 |
< 0.005 Ohm cm |
0 +/- 0 |
45 +/- 1 |
2800 - 5200 Ohm-cm |
SSP |
|
| S57-503 |
Download |
7 |
475 +/- 5 |
5 -30 Ohmcm |
5000 +/- 250 |
5 +/- 0.5 |
< 0.01 Ohm-cm |
SSP |
|
| S82-201 |
Download |
2 |
475 +/- 5 |
1 -20 Ohmcm |
5000 +/- 250 |
10 +/- 0.5 |
1 -20 Ohm-cm |
SSP |
|
| S83-801 |
Download |
3 |
475 +/- 5 |
0.001 - 0.005 Ohm cm |
0 +/- 0 |
50 +/- 1 |
> 5000 Ohm-cm |
SSP |
|
| S84-701 |
Download |
11 |
475 +/- 5 |
1 -10 Ohm-cm |
10000 +/- 500 |
10 +/- 0.5 |
1 -3 Ohm-cm |
SSP |
|
| S11-203 |
Download |
11 |
475 +/- 5 |
2800 - 5200 ohm-cm |
10000 +/- 500 |
20 +/- 2 |
< 0.005 ohm-cm |
SSP |
|
| S11-205 |
Download |
3 |
475 +/- 5 |
2800 - 5200 Ohmcm |
5000 +/- 250 |
20 +/- 1 |
< 0.003 Ohm-cm |
SSP |
|
| S15-606 |
Download |
10 |
475 +/- 5 |
> 1000 Ohm-cm |
40000 +/- 2000 |
15 +/- 0.5 |
> 1000 Ohm-cm |
SSP |
|
| S20-02 |
Download |
5 |
480 +/- 5 |
5000 - 10000 Ohmcm |
22000 +/- 1001 |
27.5 +/- 1 |
< 0.003 Ohm-cm |
SSP |
|
| S13-401 |
Download |
2 |
480 +/- 5 |
0 - 0.005 |
0 +/- 0 |
45 +/- 1 |
4000 -10,000 |
SSP |
|
| S13-402 |
Download |
6 |
480 +/- 5 |
0-0.005 ohm-cm |
0 +/- 0 |
45 +/- 1 |
2500 - 5500 ohm-cm |
SSP |
|
| S44-901 |
Download |
5 |
480 +/- 5 |
1- 10 |
10000 +/- 500 |
10 +/- 0.5 |
1 -10 |
SSP |
|
| S64-702 |
Download |
4 |
485 +/- 5 |
> 4000 Ohmcm |
5000 +/- 250 |
20 +/- 2 |
0.001 - 0.005 Ohm-cm |
SSP |
|
| S51-201 |
Download |
1 |
490 +/- 5 |
< 0.005 Ohm cm |
0 +/- 0 |
20 +/- 1 |
2800 - 5200 Ohm-cm |
SSP |
|
| S13-701 |
Download |
3 |
490 +/- 5 |
0 - 0.005 |
0 +/- 0 |
35 +/- 1 |
4000 -10,000 |
SSP |
|
| S13-702 |
Download |
7 |
490 +/- 5 |
0-0.005 ohm-cm |
0 +/- 0 |
35 +/- 1 |
2500 - 5500 ohm-cm |
SSP |
|
| S53-901 |
Download |
4 |
500 +/- 5 |
1- 30 Ohmcm |
10000 +/- 500 |
15 +/- 0.5 |
>4000 Ohm-cm |
SSP |
|
| S67-501 |
Download |
2 |
500 +/- 5 |
< 0.005 Ohm cm |
0 +/- 0 |
25 +/- 1 |
2800 - 5200 Ohm-cm |
SSP |
|
| S78-601 |
Download |
5 |
500 +/- 5 |
< 0.005 Ohm cm |
0 +/- 0 |
25 +/- 1 |
2500 - 5500 Ohm-cm |
SSP |
|
| S95-202 |
Download |
9 |
500 +/- 5 |
1 -20 Ohm-cm |
5000 +/- 250 |
5 +/- 0.5 |
10-20 Ohm-cm |
SSP |
|
| S26-01 |
Download |
4 |
500 +/- 5 |
5000 - 10000 Ohmcm |
22000 +/- 1001 |
7.5 +/- 0.5 |
< 0.003 Ohm-cm |
SSP |
|
| S67-302 |
Download |
11 |
505 +/- 5 |
< 0.005 Ohm cm |
0 +/- 0 |
20 +/- 1 |
800 - 1500 Ohm-cm |
SSP |
|
| S48-101 |
Download |
2 |
513 +/- 5 |
<0.003 |
0 +/- 0 |
12 +/- 0.5 |
> 4000 |
SSP |
|
| S13-301 |
Download |
9 |
514 +/- 5 |
0 - 0.005 |
0 +/- 0 |
11 +/- 1 |
4000 - 10,000 |
SSP |
|
| S13-302 |
Download |
22 |
514 +/- 5 |
0-0.005 ohm-cm |
0 +/- 0 |
11 +/- 1 |
2500 - 5500 ohm-cm |
SSP |
|
| S47-001 |
Download |
2 |
519 +/- 5 |
0-0.005 ohm-cm |
0 +/- 0 |
6 +/- 0.5 |
4000-10,000 ohm-cm |
SSP |
|
| S41-501 |
Download |
5 |
521 +/- 5 |
0-0.005 |
0 +/- 0 |
3.5 +/- 0.5 |
4000-10,000 |
SSP |
|
| S41-402 |
Download |
8 |
522 +/- 5 |
0-0.005 ohm-cm |
0 +/- 0 |
2.5 +/- 0.5 |
2500 - 5500 ohm-cm |
SSP |
|
| S76-903 |
Download |
16 |
525 +/- 5 |
1 - 10 Ohm-cm |
10000 +/- 500 |
20 +/- 1 |
1 - 10 Ohm-cm |
SSP |
|
| S73-04 |
Download |
27 |
525 +/- 5 |
1-10 Ohm-cm |
30000 +/- 1500 |
100 +/- 0.5 |
1-10 Ohm-cm |
DSP |
|
| S38-902 |
Download |
6 |
750 +/- 25 |
< 0.005 |
0 +/- 0 |
300 +/- 25 |
> 4000 |
SSP |
EPI wafer |
| S77-002 |
Download |
11 |
814 +/- 5 |
< 0.005 |
0 +/- 0 |
300 +/- 2 |
12000 - 20000 Ohmcm |
SSP |
|
|
125 mm Diameter |
|
|
|
| Part No. |
Complete Spec (pdf) |
Quantity available |
Handle thickness (um) |
Handle Res (ohm-cm) |
Buried oxide (A) |
Device Thickness (um) |
Device Res (ohm-cm) |
Polish |
Notes |
| S67-401 |
Download |
2 |
375 +/- 5 |
< 0.005 Ohm cm |
0 +/- 0 |
150 +/- 2 |
6000 - 20000 Ohm-cm |
SSP |
|
| S72-01 |
Download |
2 |
475 +/- 5 |
< 0.003 |
0 +/- 0 |
149.7 +/- 2 |
10000 - 15000 |
SSP |
|
| S78-903 |
Download |
1 |
500 +/- 5 |
1 - 20 Ohm-cm |
10000 +/- 500 |
30 +/- 1 |
1 - 20 Ohm-cm |
SSP |
|
| S71-01 |
Download |
6 |
525 +/- 5 |
< 0.003 |
0 +/- 0 |
100 +/- 2 |
10000 - 15000 |
SSP |
|
| S78-904 |
Download |
7 |
560 +/- 5 |
1 - 20 Ohm-cm |
10000 +/- 500 |
30 +/- 1 |
1 - 20 Ohm-cm |
SSP |
|
| S70-01 |
Download |
3 |
575 +/- 5 |
< 0.003 |
0 +/- 0 |
50 +/- 1 |
10000 - 15000 |
SSP |
|
| S40-01 |
Download |
4 |
610 +/- 5 |
3-5 |
10000 +/- 250 |
16 +/- 1 |
5 -7 |
SSP |
|
|
150 mm Diameter |
|
|
|
| Part No. |
Complete Spec (pdf) |
Flat Length (mm) |
Quantity available |
Handle thickness (um) |
Handle Res (ohm-cm) |
Buried oxide (A) |
Device Thickness (um) |
Device Res (ohm-cm) |
Polish |
Notes |
| S80-701 |
Download |
57.5 +/- 2.5 |
3 |
300 +/- 5 |
1 - 50 Ohm-cm |
10000 +/- 500 |
20 +/- 1 |
1 - 50 Ohm-cm |
SSP |
|
| S84-301 |
Download |
57.5 +/- 2.5 |
2 |
350 +/- 5 |
1 - 20 Ohm-cm |
4000 +/- 200 |
20 +/- 1 |
1 - 20 Ohm-cm |
SSP |
|
| S41-602 |
Download |
57.5 +/- 2.5 |
3 |
353 +/- 5 |
1 -20 |
4000 +/- 200 |
20 +/- 1 |
1 - 20 |
DSP |
|
| S42-507 |
Download |
47.5 +/- 2.5 mm |
14 |
353 +/- 5 |
1 每 20 Ohmcm |
10000 +/- 500 |
2 +/- 0.5 |
1 每 20 Ohmcm |
DSP |
|
| S42-508 |
Download |
47.5 +/- 2.5 mm |
18 |
353 +/- 5 |
1 每 20 Ohmcm |
10000 +/- 500 |
5 +/- 0.5 |
1 每 20 Ohmcm |
DSP |
|
| S42-509 |
Download |
|
18 |
353 +/- 5 |
1 - 20 Ohm cm |
10000 +/- 500 |
10 +/- 0.5 |
1 - 20 Ohm-cm |
DSP |
|
| S79-601 |
Download |
57.5 +/- 2.5 |
30 |
400 +/- 5 |
1 - 10 Ohmcm |
40000 +/- 1000 |
10 +/- 0.5 |
1 - 10 Ohm-cm |
SSP |
|
| S40-401 |
Download |
57.5mm +/- 2.5 |
1 |
400 +/- 5 |
1-10 Ohmcm |
10000 +/- 500 |
5 +/- 0.5 |
0.01 每 0.02 Ohmcm |
DSP |
|
| S45-902 |
Download |
47.5 +/- 2.5 mm |
11 |
400 +/- 5 |
1 -20 Ohmcm |
21000 +/- 1050 |
35 +/- 1 |
1 - 20 Ohmcm |
DSP |
|
| S72-201 |
Download |
47.5 +/- 2.5 |
14 |
403 +/- 5 |
1 - 30 Ohmcm |
10000 +/- 500 |
10 +/- 0.5 |
1 -10 Ohm-cm |
SSP |
|
| S58-902 |
Download |
57.5 +/- 2.5 |
3 |
500 +/- 5 |
1 - 20 Ohmcm |
30000 +/- 1500 |
15 +/- 0.5 |
0.008 - 0.025 Ohm-cm |
SSP |
|
| S74-701 |
Download |
47.5 +/- 2.5 |
5 |
500 +/- 5 |
0.01 - 0.05 Ohmcm |
5000 +/- 250 |
24 +/- 0.5 |
0.01 - 0.05 Ohm-cm |
DSP |
|
| S77-903 |
Download |
57.5 +/- 2.5 |
8 |
525 +/- 5 |
1 - 20 Ohmcm |
4000 +/- 200 |
60 +/- 1 |
1 - 20 Ohm-cm |
DSP |
|
| S17-902 |
Download |
47.5mm +/-2.5 |
5 |
525 +/- 5 |
1 - 10 |
10000 +/- 500 |
100 +/- 0.5 |
>4000 |
DSP |
|
| S47-202 |
Download |
47.5 +/- 2.5 |
2 |
525 +/- 5 |
1 - 20 O-cm |
20000 +/- 1000 |
6 +/- 0.5 |
10 - 22 O-cm |
DSP |
|
| S47-302 |
Download |
47.5 +/- 2.5 |
3 |
525 +/- 5 |
1 - 20 O-cm |
20000 +/- 1000 |
8 +/- 0.5 |
10 - 22 O-cm |
DSP |
|
| S47-402 |
Download |
47.5 +/- 2.5 |
3 |
525 +/- 5 |
1 - 20 O-cm |
20000 +/- 1000 |
10 +/- 0.5 |
10 - 22 O-cm |
DSP |
|
| S47-502 |
Download |
47.5 +/- 2.5 |
4 |
525 +/- 5 |
1 - 20 O-cm |
20000 +/- 1000 |
12 +/- 0.5 |
10 - 22 O-cm |
DSP |
|
| S47-602 |
Download |
47.5 +/- 2.5 |
4 |
525 +/- 5 |
1 - 20 O-cm |
20000 +/- 1000 |
14 +/- 0.5 |
10 - 22 O-cm |
DSP |
|
| S69-201 |
Download |
47.5 +/- 2.5 |
5 |
528 +/- 5 |
1 - 30 Ohmcm |
10000 +/- 500 |
12 +/- 0.5 |
1 - 30 Ohm-cm |
SSP |
|
| S78-501 |
Download |
57.5 +/- 2.5 |
13 |
550 +/- 5 |
0.01 - 0.05 Ohmcm |
20000 +/- 1000 |
85 +/- 1 |
0.01 - 0.05 Ohm-cm |
SSP |
|
| S89-701 |
Download |
47.5 +/- 2.5 |
1 |
550 +/- 5 |
1 - 100 Ohmcm |
10000 +/- 500 |
51 +/- 0.5 |
1 - 100 Ohmcm |
SSP |
|
| S45-101 |
Download |
|
1 |
550 +/- 5 |
1 -30 Ohm cm |
20000 +/- 1000 |
5 +/- 0.5 |
1 - 20 Ohm-cm |
DSP |
this sia triple lauer product that must have the third layer recorded on
paper |
| S54-401 |
Download |
|
1 |
573 +/- 5 |
1.5 - 6.5 Ohmcm |
20000 +/- 1000 |
50 +/- 1 |
20.7 - 25.3 Ohm-cm |
SSP |
|
| S91-001 |
Download |
57.5 +/- 2.5 |
2 |
575 +/- 5 |
1 -10 Ohmcm |
20000 +/- 1000 |
2 +/- 0.5 |
1 - 10 Ohmcm |
SSP |
|
| S21-302 |
Download |
47.5 +/- 2.5 |
1 |
575 +/- 5 |
1 - 20 |
20000 +/- 1000 |
8.7 +/- 0.5 |
14 - 22 |
SSP |
|
| S21-502 |
Download |
47.5 +/- 2.5 |
1 |
575 +/- 5 |
1 - 20 |
20000 +/- 1000 |
10.7 +/- 0.5 |
14 - 22 |
SSP |
|
| S21-602 |
Download |
47.5 +/- 2.5 |
1 |
575 +/- 5 |
1 - 20 |
20000 +/- 1000 |
11.7 +/- 0.5 |
14 - 22 |
SSP |
|
| S50-001 |
Download |
57.5 +/- 2.5 |
7 |
600 +/- 5 |
0.01 每 0.02 |
20000 +/- 1000 |
100 +/- 1 |
0.01 每 0.02 |
SSP |
|
| S79-103 |
Download |
47.5 +/- 2.5 |
10 |
603 +/- 5 |
1 - 20 Ohm-cm |
5000 +/- 250 |
6 +/- 0.5 |
1 - 12.5 Ohm-cm |
SSP |
|
| S64-01 |
Download |
57.5 +/- 2.5 |
6 |
617 +/- 5 |
1 - 5 |
11000 +/- 550 |
7.5 +/- 1 |
15 - 25 |
SSP |
|
| S64-02 |
Download |
57.5 +/- 2.5 |
6 |
617 +/- 5 |
1-5 O-cm |
11000 +/- 249.7 |
7.5 +/- 1 |
15 - 25 |
SSP |
|
| S37-301 |
Download |
47.5 +/- 2.5 |
7 |
620 +/- 5 |
2 - 10 |
10000 +/- 500 |
5 +/- 0.5 |
35 Ohmcm +/- 10% |
SSP |
|
| S76-801 |
Download |
57.5 +/- 2.5 |
7 |
625 +/- 5 |
0.001 - 100 Ohmcm |
5000 +/- 250 |
50 +/- 1 |
1 -10 Ohm-cm |
SSP |
|
| S87-03 |
Download |
57.5 +/- 2.5 |
6 |
655 +/- 5 |
1 -30 |
20000 +/- 1000 |
30 +/- 1 |
7-9 |
SSP |
|
| S45-501 |
Download |
57.5 +/- 2.5 mm |
2 |
655 +/- 5 |
1 -30 -cm |
20000 +/- 1000 |
30 +/- 1 |
7-9 O-cm |
SSP |
|
|
|