Silicon Carbide Wafer (SiC) : SCSA-SiC-10
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  [ Silicon Carbide Wafer ]

     Á¦Á¶¾÷ü : SCSA
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Typical Properties

Chemical Formula : SiC

Formula weight: 40.10

Unit Cell: Hexagonal

Lattice constant: a =3.08 A¡Æ c = 15.08 A¡Æ

Stacking sequence: ABCACB (6H)

Growth Technique: MOCVD

Orientation: on axis or 3.5¡Æ off (0001)

Polish: Silicon face polished

Band Gap: 2.93 eV ( Indirect)

Conductivity type: N

Resistivity: 0.076 ohm-cm

Dielectric Constant: e(11) = e(22) = 9.66 e(33) = 10.33

Thermal Conductivity @ 300K: 5 W / cm . K

Hardness: 9 Mohs

Standard substrate size: 2¡± dia x 0.4 mm thick

10 mm x 10 mm x 0.4 mm


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¸ðµ¨¸í Stock No. Dopant Orientation Substrate Size Polishing ¼ö·® °¡°Ý
  SCSA-SiC-10 SCZ10 Undoped 0001 10x10x0.3mm 1 side polished °ßÀû°¡
  SCSA-SiC-11 SCZ11 Undoped 0001 10x10x0.3mm 2 side polished °ßÀû°¡
  SCSA-SiC-20 SCZ20 Undoped 0001 5x5x0.3mm 1 side polished °ßÀû°¡
  SCSA-SiC-21 SCZ21 Undoped 0001 5x5x0.3mm 2 side polished °ßÀû°¡