Silicon Carbide Wafer (SiC) : SCSA-SiC-10
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Silicon Carbide Wafer
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SCSA
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Typical Properties
Chemical Formula : SiC
Formula weight: 40.10
Unit Cell: Hexagonal
Lattice constant: a =3.08 A¡Æ c = 15.08 A¡Æ
Stacking sequence: ABCACB (6H)
Growth Technique: MOCVD
Orientation: on axis or 3.5¡Æ off (0001)
Polish: Silicon face polished
Band Gap: 2.93 eV ( Indirect)
Conductivity type: N
Resistivity: 0.076 ohm-cm
Dielectric Constant: e(11) = e(22) = 9.66 e(33) = 10.33
Thermal Conductivity @ 300K: 5 W / cm . K
Hardness: 9 Mohs
Standard substrate size: 2¡± dia x 0.4 mm thick
10 mm x 10 mm x 0.4 mm
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Stock No.
Dopant
Orientation
Substrate Size
Polishing
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SCSA-SiC-10
SCZ10
Undoped
0001
10x10x0.3mm
1 side polished
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SCSA-SiC-11
SCZ11
Undoped
0001
10x10x0.3mm
2 side polished
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SCSA-SiC-20
SCZ20
Undoped
0001
5x5x0.3mm
1 side polished
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SCSA-SiC-21
SCZ21
Undoped
0001
5x5x0.3mm
2 side polished
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