Uniformity ±3% across a 4" substrate by use of a unique magnetic circuit producing an extremely uniform erosion zone.
Low impedance head enables both RF erosion zone.
Adjustable target clamping allows target thickness from foils to 5/8".
The use of high strength rare earth magnets allows excellent target utilization at high deposition rates.
Quick, easy target change is accomplished by the use of a threaded clamp and anode shield.
Turbulent water flow provides uniform target cooling which minimizes thermal shock of ceramic materials.
Varying magnetic arrays are available which allow sputtering of magnetic materials up to 1/4" thick.
Ultra-compact design makes this source ideal for multiple cathode deposition clusters or for use in small vacuum chambers.
All utilities are maintained at atmosphere and are accessed through a standard 1 inch "O"-ring compression fitting for ease of retrofit into any existing vacuum system.
Can be manufactured for external or internal mounts.
Extremely low operating pressure in the 10-4 range.
Operation Specifications
Maximum Sputtering Power : 3000 Watts D.C. ; 1500 Watts R.F.
Cathode Voltage : 100 to 1500 volts
Discharge Current : .1 to 3 amp
Cooling Requirements
Flow Rate : 2 gallon/minute
Maximum Input Temperature : 30°C
Input Pressure (open drain) : 60 psi
Target
Form : Circular/Planar
Diameter : 4.0" (±.010")
Thickness : 0.010" - 0.625"
Cooling : Indirect
Magnetic Enhancement : Permanent (NdFeB)
Source Dimensions
Outside Diameter : 5.00"
Cathode Length : 3.00"
Weight : 8 pounds
Mounting
Source : 1" dia. "O"-ring seal
Water : .250" OD Tubing
Power : As required
Maximum Temperature : 100°C
Source of Substance Distance : 4 - 12"
Uniformity : ±3% across 4" ; substrate at 4"
Construction
Cathode Body : OFHC Copper
Anode : 304/316 Stainless Steel
Insulator : High Density CTFE
Model
Order Code
Description
ONXY 4 Standard
ON-4STD
8" Straight 0.75" OD Tubing
ONXY 4 90° Angle
ON-4A90
90° Angle 0.75" OD Tubing
ONXY 4 Flexmount
ON-4FLX
±45° Flex Assembly
ONXY 4 External
ON-4E
External Mounting
ONXY 4 UHV
ON-4UHV
Flange Mount UHV Version
Accessories
Stainless Steel Feedthrough
1X75SS
1" Compression Fitting
Gas Inlet Ring
GIR2
Stainless Steel Assembly
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