소모품기타 : 2X15SS
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  [ ONYXTM-8 ]

     제조업체 : SCSA
     납기일    :  발주후 2주~4주
     부가세    :  부가세 별도
 

Magnetron Sputtering Source
  • Uniformity ±5% across a 8" substrate by use of a unique magnetic circuit producing an extremely uniform erosion zone.
  • Low impedance head enables both RF erosion zone.
  • The use of high strength rare earth magnets allows excellent target utilization at high deposition rates.
  • Ultra-compact design makes this source ideal for high throughput production systems.
  • Turbulent water flow provides uniform target cooling which minimizes thermal shock of ceramic materials.
  • Varying magnetic arrays are available which allow sputtering of magnetic materials.
  • All utilities are maintained at atmosphere and are accessed through a standard 1.5 inch "O"-ring compression fitting.
  • Can be manufactured for external or internal mounts.
  • Extremely low operating pressure in the 10-4 range.


Operation Specifications

  • Maximum Sputtering Power : 15 Kilowatts D.C. ; 5 Killwatts R.F.
  • Cathode Voltage : 100 to 1500 volts
  • Discharge Current : .1 to 10 amp
  • Cooling Requirements
    • Flow Rate : 2 gallon/minute
    • Maximum Input Temperature : 30° C
    • Input Pressure (open drain) : 60 psi
  • Target
    • Form : Circular/Planar
    • Diameter : 8.0” (±.010”)
    • Thickness : 0.125” - 0.75”
    • Cooling : Indirect
  • Magnetic Enhancement : Permanent (NdFeB)
  • Source Dimensions
    • Outside Diameter : 9.375”
    • Cathode Length : 6.00”
    • Weight : 55 pounds
  • Mounting
    • Source : 1.5” dia. ‘O’-ring seal
    • Water : .375” OD Tubing
    • Power : As required
  • Maximum Temperature : 100°C
  • Source of Substance Distance : 2 - 12”
  • Uniformity : ±5% across 8” ; substrate at 4”
  • Construction
    • Cathode Body : OFHC Copper
    • Anode : 304/316 Stainless Steel
    • Insulator : High Density CTFE

Model

Order Code

Description

ONXYTM 8 Standard

ON-8STD

8" Straight. 1.5" OD Tubing

ONXYTM 8 External

ON-8E

External Mounting

ONXYTM 8 UHV

ON-8UHV

Flange Mount UHV Version

Accessories

Stainless Steel Feedthrough

2X15SS

1.5" Compression Fitting

Gas Inlet Ring

GIR8

Stainless Steel Assembly

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모델명 수량 가격
  2X15SS 견적가
  GIR8 견적가
  ON-8E 견적가
  ON-8STD 견적가
  ON-8UHV 견적가