Uniformity±3% across a 1" substrate by use of a unique magnetic circuit producing an extremely uniform erosion zone.
Low impedance head enables both RF erosion zone.
Adjustable target clamping allows target thickness from foils to 1/8".
The use of high strength rare earth magnets allows excellent target utilization at high deposition rates.
Quick, easy target change is accomplished by the use of a threaded clamp and anode shield.
Turbulent water flow provides uniform target cooling which minimizes thermal shock of ceramic materials.
Ultra-compact design makes this source ideal for multiple cathode deposition clusters or for use in small vacuum chambers.
All utilities are maintained at atmosphere and are accessed through a standard 1 inch "O"-ring compression fitting for ease of retrofit into any existing vacuum system.
Can be manufactured for external or internal mounts.
Extremely low operating pressure in the 10-4 range.
Operation Specifications
Maximum Sputtering Power : 150 Watts D.C. ; 75 Watts R.F.
Cathode Voltage : 100 to 1000 volts
Discharge Current : .1 to 1 amp
Cooling Requirements
Flow Rate : .5 gallon/minute
Maximum Input Temperature : 30°C
Input Pressure (open drain) : 60 psi
Target
Form : Circular/Planar
Diameter : 1.0” (±.010”)
Thickness : 0.010” - 0.125”
Cooling : Indirect
Magnetic Enhancement : Permanent (NdF eB)
Source Dimensions
Outside Diameter : 1.5”
Cathode Length : 1.4”
Weight : .5 pounds
Mounting
Source : 1” dia. ‘O’-ring seal
Water : .187” OD Tubing
Power : Type N Connector
Maximum Temperature : 100°C
Source of Substance Distance : 2 - 12”
Uniformity : ±3% across 1” ; substrate at 4”
Construction
Cathode Body : OFHC Copper
Anode : 304/316 Stainless Steel
Insulator : High Density CTFE
Model
Order Code
Description
ONXY 1 Standard
ON-1STD
8" Straight. 75" OD Tubing
ONXY 1 90° Angle
ON-1A90
90° Angle. 75" OD Tubing
ONXY 1 Flexmount
ON-1FLX
±45° Flex Assembly
ONXY 1 UHV
ON-1UHV
Flange Mount UHV Version
Accessories
Stainless Steel Feedthrough
1X75SS
1" Compression Fitting
Gas Inlet Ring
GIR2
Stainless Steel Assembly
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