Next the finished Ingot
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Next the finished Ingot is ground to a rough size diameter (a little larger than a finished wafer) and it is either notched or flatted along it's length to indicate the orientation of the Ingot. This is also a point when many inspections are made on the ingot to catch any major flaws or problems with resistivity etc. The 200mm and 150mm ingots at the LEFT are freshly pulled and have not yet been ground, notched or flatted.


 
 
Total 20 °Ç
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20   Epitaxy °ü¸®ÀÚ 07-01-26 2737
19   Defects °ü¸®ÀÚ 07-01-26 3092
18   Resistivity °ü¸®ÀÚ 07-01-26 2922
17   Bow & Warp °ü¸®ÀÚ 07-01-26 3457
16   Site TIR or Total Indicator Reading °ü¸®ÀÚ 07-01-26 1791
15   Total Thickness Variation °ü¸®ÀÚ 07-01-26 1002
14   N-Type wafers °ü¸®ÀÚ 07-01-26 898
13   P-Type wafers °ü¸®ÀÚ 07-01-26 1505
12   Particles °ü¸®ÀÚ 07-01-26 810
11   Final sort and inspection °ü¸®ÀÚ 07-01-26 899
10   Final Cleaning °ü¸®ÀÚ 07-01-26 872
9   Polishing °ü¸®ÀÚ 07-01-26 938
8   Lapping °ü¸®ÀÚ 07-01-26 982
7   Slicing °ü¸®ÀÚ 07-01-26 863
  Next the finished Ingot °ü¸®ÀÚ 07-01-26 846
  
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